サムコ(株)

会社概要

SAMCO Inc. manufactures and sales semiconductor and materials in Japan and internationally. The company primarily offers thin film deposition, microfabrication, cleaning, and surface treatment products. Its deposition systems include atomic layer deposition systems, Plasma enhanced chemical vapor deposition (PECVD) systems, liquid source CVD systems, and diamond-like carbon coating systems; and etching systems comprise inductively coupled plasma (ICP), silicon deep reactive ion, reactive ion, and xenon difluoride etching systems. It also provides Aqua Plasma cleaner, a plasma processing equipment; plasma cleaners; and UV ozone cleaners. The company was formerly known as SAMCO International, Inc. and changed its name to SAMCO Inc. in December 2004. SAMCO Inc. was incorporated in 1979 and is headquartered in Kyoto, Japan.